Positioning Stage With Nanometer Precision

AUBURN, MA—PI’s new N-332 nanometer-precision linear stage family is designed for high-end applications in semiconductors, fiber-optics, microscopy, nanobiotechnology, metrology, and research on beamlines and lasers. 

Configurable to multiaxis setups of XY, XZ and XYZ, the stages have a low profile of 30 millimeters and a small footprint of 80 by 110 millimeter or 80 by 160 millimeters with travel ranges of 1 inch and 2 inches, respectively.

Due to a high active force of 75 newtons and a power-off passive holding force of 80 newtons, the stage does not require a brake or counterbalance when operated in a vertical orientation.

For demanding applications that require operation in high vacuum, stages are available in configurations suitable for pressures down to 10^-9 hectopascals. The self-clamping nature of the piezo motor allows the stage to hold a position without heat generation.

The PICMA-Walk piezo motor inside the stage is based on four pairs of PI’s proprietary PICMA piezo actuators, arranged in a V8 configuration. PICMA piezo actuators were successfully tested for 100 billion cycles by NASA before being used on the Mars Rover’s instrumentation lab. PICMA-Walk motors provide high-force linear motion to 75 newtons and are capable of subnanometer resolution and self-locking when de-energized—a great advantage for applications where a stable position must be maintained without power, heat generation or servo jitter.